Atomic Layer Deposition Al2O3
July 23, 2024
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![PDF] Competition between Al2O3 atomic layer etching and AlF3 atomic layer depositio…](https://d3i71xaburhd42.cloudfront.net/e2ac2e88133be5a7278abdd433a3dd75d426a246/2-Figure1-1.png){kind=link}
![PDF] Surface chemistry of plasma-assisted atomic layer deposition of Al2O3 studied …](https://d3i71xaburhd42.cloudfront.net/ad672bef99fe0f9aaf9f7d8a694d4b371f007dd7/2-Figure1-1.png){kind=link}
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![PDF] Aluminum oxide nucleation in the early stages of atomic layer deposition on ep…](https://d3i71xaburhd42.cloudfront.net/a4ed22f1f8c273343e39ef33f412d4ca18a12625/9-Figure2-1.png){kind=link}
![PDF] Influence of the Oxidant on the Chemical and Field-Effect Passivation of Si by…](https://d3i71xaburhd42.cloudfront.net/a8dbe3e854d267294a3aaec043a7829dc6da49ee/3-TableI-1.png){kind=link}